Gyroscope sensitivity calibration
US10837796B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2018 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Oct 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An in-situ calibration system, method and apparatus is disclosed that uses test electrodes to stimulate a proof-mass of a MEMS based gyroscope at a drive frequency as quasi-Coriolis forces to extract the electromechanical gain, and uses a non-resonant carrier signal on the proof-mass to extract the additional changes in the sense and drive capacitance. Additionally, an in-situ calibration system, method and apparatus is disclosed that uses quadrature electrodes to apply a known force stimulus to the proof-mass as part of a calibration procedure, where the known force is applied again after installation into a system or further into the life of the gyroscope. Differences in the proof-mass response to the force are proportional to changes in sensitivity, which allows the sensitivity to be corrected in-field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.