Resonance MEMS mirror control system
US10838196B2 · kind B2 · utility
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16References
24Claims
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Key dates
| Filing date | Jan 25, 2019 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Feb 20, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for controlling operation of a MEMS mirror includes steps for: generating activation pulses for operating the MEMS mirror and generating a window activation signal for current detection, with the window activation signal overlapping with an end of an activation pulse. The method also includes detecting current through a stator or a rotor of the MEMS mirror during the window activation signal and terminating a current activation pulse and the window activation signal in response to detecting a change in the direction of the current through the stator or the rotor of the MEMS mirror during the window activation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.