Patent · US Active

Electro-absorption modulator

US10838240B2 · kind B2 · utility

2Cited by
0References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2019
Grant dateNov 17, 2020
Priority date
Expiry dateFeb 26, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2202/108
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optoelectronic device comprising: a silicon-on-insulator (SOI) substrate, the substrate comprising: a silicon support layer; a buried oxide (BOX) layer on top of the silicon support layer; and a silicon device layer on top of the BOX layer; a waveguide region, where a portion of the silicon device layer and a portion of the BOX layer underneath the portion of the device layer have been removed, the portion of the BOX layer having been replaced with a layer of silicon and a layer of crystalline oxide on top of the silicon; and a waveguide structure located directly on top of the crystalline oxide layer, the waveguide structure including a P doped region, and an N doped region with an intrinsic region in-between, creating a PIN junction across which a bias can be applied to create a modulation region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.