Active gas generation apparatus including a metal housing, first and second auxiliary members, and a housing contact
US10840065B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2016 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Dec 5, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An active gas generator that generates active gas by activating supplied material gas through discharge in a discharge space formed between a high-voltage side electrode component and a ground side electrode component of an active gas generation electrode group. A combined structure of covers completely separates the discharge space from an alternating-current voltage application space, and includes, independently from the alternating-current voltage application space, a material gas flow path for a material gas supply path, through which externally supplied material gas is guided to the discharge space. A housing contact space formed between a metal housing and each of the covers and an electrode component installation table is completely separated from the alternating-current voltage application space and the discharge space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.