Patent · US Active

Evacuation of a film chamber

US10844877B2 · kind B2 · utility

1Cited by

10References

12Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Silvio Decker · Cologne, DE
Michael Dauenhauer · Cologne, DE
Daniel Wetzig · Cologne, DE
Hjalmar Bruhns · Bonn, DE

Key dates

Filing date	Sep 15, 2014
Grant date	Nov 24, 2020
Priority date	—
Expiry date	Jun 25, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01M3/229
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.