Measuring device based on an optical measurement in an opto-mechanical cavity
US10845242B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2019 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Nov 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/1702
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring device includes a first light source for emitting an excitation beam at an excitation wavelength; and an excitation optical cavity, optically resonant at the excitation wavelength, and arranged such that it receives the excitation beam; a second light source for emitting a measurement beam at a measurement wavelength; and a mechanical element mounted such that it can move about an elastic recovery position and/or such that it is elastically deformable, located both on the optical path of the excitation beam in the excitation optical cavity and on the optical path of the measurement beam, and capable of being displaced and/or deformed by the excitation beam. One of either the excitation beam or the measurement beam is capable of causing the movable and/or deformable mechanical element to oscillate. The measuring device can in particular be used as a gas sensor or as a mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.