In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection
US10845325B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2018 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Mar 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4074
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid-state, low power microheater sensor platform that is configurable with selected metal oxide films for particular gas sensing applications is described. The sensor platform is configured by selecting a chemiresistive or catalytic material that is suitable for detecting a desired gas and then forming a porous nanostructured film on the designated surfaces of the microheater platform. Also described are methods for creating a highly porous, nanostructured metal oxide film in a controlled location from a liquid precursor using a localized heat source. By fast annealing deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in-situ and locally on the sensor platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.