Hydrogen sensor production method and hydrogen sensor produced thereby
US10845350B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 19, 2016 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Sep 14, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a method of manufacturing a hydrogen sensor and a hydrogen sensor manufactured thereby. Specifically, the method according to the present invention includes a step of forming a self-assembled single layer on a stamp substrate provided with nanoline-patterned uneven parts; a step of depositing a metal thin film layer on the self-assembled single layer; a step of disposing the stamp substrate on a flexible sensor substrate so that a polymer layer formed on the sensor substrate and the metal thin film layer deposited on the uneven parts are brought into contact with each other; a step of transferring a metal nanoribbon array having nanogaps to the sensor substrate by performing pressure and heat treatment on the stamp substrate and removing the stamp substrate; and a step of forming first and second electrodes on both ends of the transferred metal nanoribbon array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.