Probe pin alignment apparatus
US10845386B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2019 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Oct 10, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe pin alignment apparatus includes a beam-splitting element, an image-sensing device and a light-reflecting element. The beam-splitting element has a first illuminating surface facing a probe element, a second illuminating surface facing an object, and a light incident surface. The beam-splitting element has a semi-reflective surface for reflecting a light beam from the light incident surface to the probe element. The image-sensing device is disposed externally to the light incident surface of the beam-splitting element. The light-reflecting element, disposed oppositely to the light incident surface, allows a light beam to pass through the semi-reflective surface to be reflected back to the semi-reflective surface to be further projected onto the object. The beam-splitting element outputs a probe image and an object image from the first and second illuminating surfaces through the light incident surface. The image-sensing device is to capture the probe image and the object image for performing alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.