System and method of dimensional calibration for an analytical microscope
US10846882B2 · kind B2 · utility
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33Claims
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Key dates
| Filing date | Nov 7, 2017 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Feb 4, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10056
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An embodiment of a calibration element for an analytical microscope is described that comprises a substantially non-periodic pattern of features that exhibit contrast when illuminated by a light beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.