High flow low pressure control valve
US10852752B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 31, 2019 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | Feb 23, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Mass flow controllers and control valves are disclosed. A control valve includes a poppet including a plurality of vertical flow channels, and the control valve also includes an orifice element that includes a plurality of vertical flow channels extending from a bottom surface of the orifice element, through the orifice element, to a top surface of the orifice element. The vertical flow channels of the orifice element are axially misaligned with the vertical flow channels of the poppet to prevent gas from flowing through the orifice element when the gap between the top surface of the poppet and the bottom surface of the orifice element is closed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.