Method for the transportation and storage of a semiconductor plate in a hermetic container
US10854487B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Sep 5, 2017 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | Sep 5, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/32
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a method for the transportation and/or storage of at least one semiconductor plate, in which the plate is disposed in a hermetic container (1) filled with hydrogen at a pressure of between 10−1 and 4*103 Pa and, optionally, at least one inert gas, the total pressure in the casing being between 10−1 and 5*104 Pa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.