Semiconductor device
US10854562B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2020 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | May 6, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device includes a semiconductor substrate having a chip region and an edge region, a plurality of connection structures provided in a lower insulating layer of the edge region and arranged at first intervals in a first direction, an upper insulating layer covering the connection structures, and a plurality of redistribution pads disposed on the upper insulating layer and connected to the connection structures, respectively. Each of the redistribution pads includes a pad portion provided on the chip region. The pad portions of the redistribution pads are spaced apart from the connection structures by a first distance in a second direction intersecting the first direction when viewed in a plan view.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.