Displacement measuring apparatus
US10859369B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Oct 15, 2019 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Oct 15, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/20208
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
To enable scanning using measurement light with a small-sized displacement measuring apparatus. The displacement measuring apparatus includes a MEMS mirror for scanning using measurement light that is output from a light projection lens. The light projection lens has a focus position, at which the measurement light is condensed, at the MEMS mirror or in the vicinity of the MEMS mirror on an optical axis of the measurement light. The measurement light that is reflected at the MEMS mirror spreads in a strip-shaped manner as the measurement light comes close to a measurement region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.