Miniature electric field detector
US10859620B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2018 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Aug 26, 2038 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/0214
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects are generally directed to a compact and low-noise electric field detector, methods of operation, and methods of production thereof. In one example, an electric field detector includes a proof mass, a source of concentrated charge coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The electric field detector further includes a sense electrode disposed on the substrate within the substrate offset space and proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received electric field at the source of concentrated charge. The electric field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the electric field based on the measured change in capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.