Method and system for lot-tool assignment
US10860008B2 · kind B2 · utility
1Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2018 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Dec 17, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.