Substrate carrier deterioration detection and repair
US10861692B2 · kind B2 · utility
1Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2017 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Jun 2, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49771
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.