Method for processing a lithium tantalate crystal substrate
US10862447B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Jun 25, 2019 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Jun 25, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/64
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for processing a lithium tantalate crystal substrate includes providing a lithium tantalate crystal substrate and a metallic sheet, roughening at least one of the lithium tantalate crystal substrate and the metallic sheet, bringing the lithium tantalate crystal substrate and the metallic sheet into contact with each other after the at least one thereof is roughened, and subjecting the lithium tantalate crystal substrate to a reduction treatment. The reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.