Laser sensor for particle density detection

US10866083B2 · kind B2 · utility

Assignee

• TRUMPF PHOTONIC COMPONENTS GMBH · DE

Inventors

• Alexander Marc Van Der Lee · Eindhoven, NL
• Joachim Wilhelm Hellmig · Eindhoven, NL
• Johannes Hendrikus Maria Spruit · Eindhoven, NL
• Holger Moench · Vaals, NL
• Cornelis Reinder Ronda · Aachen, DE
• Koray Karakaya · Eindhoven, NL

Key dates

• Filing date: Jul 14, 2016
• Grant date: Dec 15, 2020
• Expiry date: Jun 26, 2037

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02A90/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention describes a laser sensor module (100) for particle density detection. The laser sensor module (100) comprising at least one first laser (110), at least one first detector (120) and at least one electrical driver (130). The first laser (110) is adapted to emit first laser light in reaction to signals provided by the at least one electrical driver (130). The at least one first detector (120) is adapted to detect a first self-mixing interference signal of an optical wave within a first laser cavity of the first laser (110). The first self-mixing interference signal is caused by first reflected laser light reentering the first laser cavity, the first reflected laser light being reflected by a particle receiving at least a part of the first laser light. The laser sensor module (100) is adapted to reduce multiple counts of the particle. The invention further describes a related method and computer program product.