Stress sensor
US10866203B2 · kind B2 · utility
3Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2017 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | May 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N19/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A stress sensor comprises: a diaphragm; an intermediate layer disposed on a surface of the diaphragm; a sensitive membrane disposed on the intermediate layer; and a piezoresistive element disposed in a region of the diaphragm in contact with an outer edge of the intermediate layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.