Photoacoustic sensor with optomechanical coupling
US10866214B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2019 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Jun 27, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/1704
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An element of a photoacoustic sensor combines an optomechanical resonator and a photoacoustic cavity. The photoacoustic cavity is formed by a measurement chamber, traversed by a pulsed excitation beam. The optomechanical resonator is formed by an optical resonator, a mechanical element for being set in rapid oscillations, by an optical signal confined in the optomechanical resonator, and in slow oscillations, by an acoustic wave generated in the photoacoustic cavity. A measurement beam is sent into the optical resonator, where it carries out several passages via the mechanical element. The optical properties thereof at the output of the optical resonator are therefore dependent on the oscillations of the mechanical element. A low-frequency-amplitude-modulated high-frequency signal can be obtained, with the amplitude modulation representing the acoustic wave in the measurement chamber. An accurate, low-noise, and highly compact method is enabled for making measurements with a photoacoustic effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.