Physical quantity sensor, electronic apparatus, and vehicle
US10866260B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2018 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Dec 29, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical quantity sensor includes an acceleration sensor having an acceleration sensor element and a package accommodating the acceleration sensor element, a support member having a first surface and supporting the acceleration sensor on the first surface, and an IC chip to which a second surface facing the first surface of the support member is attached, in which, in a plan view from a stacking direction of the acceleration sensor and the support member, in a case where an area of a region surrounded by an outer edge of the package is S1 and an area of the first surface is S2, S1≥S2 is satisfied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.