MEMS pendulum accelerometer having two measurement ranges
US10866261B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2016 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Aug 14, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer sensor having electrodes forming capacitors of capacitance that vary as a function of distances between the electrodes, a control unit being arranged to perform an operation of measuring the capacitances and a control operation that comprises selectively: a fine control stage in which a first voltage is applied between one of the stationary electrodes and the movable electrode, while the other stationary electrode is at the same potential as the movable electrode; and an extended control stage in which a second voltage is applied between one of the stationary electrodes and the movable electrode, the other stationary electrode being at the same potential as the movable electrode, and the second voltage being greater in absolute value than the first voltage.A method using such a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.