Patent · US Active

Micromechanical component and method for producing a micromechanical component

US10866407B2 · kind B2 · utility

0Cited by

0References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Daniel Maier · Stuttgart, DE
Joerg Muchow · Reutlingen, DE
Corinna Koepernik · Reutlingen, DE
Helmut Grutzeck · Tübingen, DE
Rainer Straub · Entringen, DE
Stefan Mark · Würzburg, DE
Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

Filing date	Nov 14, 2018
Grant date	Dec 15, 2020
Priority date	—
Expiry date	May 25, 2039

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0154
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.