Contact in RF-switch
US10867756B2 · kind B2 · utility
0Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2016 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Dec 3, 2036 |
Classification
- Technology area (CPC —)General
Abstract
The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.