Method for forming apparatus comprising two dimensional material
US10868121B2 · kind B2 · utility
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2References
13Claims
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Key dates
| Filing date | Aug 5, 2016 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Nov 6, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/547
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.