Optical emission spectroscopy calibration device and system including the same
US10871396B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2020 |
| Grant date | Dec 22, 2020 |
| Priority date | — |
| Expiry date | Jan 24, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical emission spectroscopy (OES) calibration system includes a chamber, an adapter, an OES device, a calibration device, and a spectrometer. The chamber includes a viewport. The adapter is fastened to the viewport, and includes a first beam splitter and a second beam splitter. The OES device detects plasma light generated in the chamber and transmitted through the adapter and generates OES data based on the detected plasma light. The calibration device includes a light source, and generates correction data for compensating for deviations in the OES data. The spectrometer detects light emitted from the light source and split by the first beam splitter or the second beam splitter. Each of the OES device, the calibration device, and the spectrometer is fastened to the adapter through an optical cable, and the calibration device generates the correction data using an intensity of light detected by the spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.