Device and method for the deposition of particles on a target
US10875322B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 8, 2018 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Mar 8, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/084
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A device for deposition of particles on a target from a transparent slide having a film formed by a fluid containing suspended particles, by locally exciting the film using a laser, includes means for observing the local excitation region. The observation means comprise a sensor and a light source, the optical axes of which are substantially shared in a space between an optical splitter and the film. The optical beam of the imaging system and the optical beam of the laser are coaxially arranged in the space between the controlled optical deflection means and the film. The device comprises a first focusing optical unit arranged between the controlled optical deflection means and the film. The device comprises a second image-combining optical unit positioned between the sensor and the splitter, the sensor being positioned in the focal plane of the second optical unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.