Systems and methods for a MEMS actuation systems device with one or more slidable connection assemblies
US10875761B2 · kind B2 · utility
0Cited by
12References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Nov 5, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/032
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro-electrical-mechanical system (MEMS) device includes one or more slidable connection assemblies for releasably coupling the micro-electrical-mechanical system (MEMS) device to a wafer from which the micro-electrical-mechanical system (MEMS) device was made. The MEMS device may include a MEMS actuation core, and a MEMS electrical connector assembly electrically coupled to the MEMS actuation core configured to be electrically coupled to a printed circuit board.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.