Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
US10876202B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2017 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Oct 26, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31732
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions and is capable of operating at atmospheric pressure. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.