Microelectromechanical system resonator devices and oscillator control circuits
US10879869B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 7, 2018 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Nov 7, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K5/24
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Reference oscillators are ubiquitous in timing applications generally, and in modern wireless communication devices particularly. Microelectromechanical system (MEMS) resonators are of particular interest due to their small size and potential for integration with other MEMS devices and electrical circuits on the same chip. In order to support their use in high volume low cost applications it would be beneficial for MEMS designers to have MEMS resonator designs and manufacturing processes that whilst employing low cost low resolution semiconductor processing yield improved resonator performance thereby reducing the requirements of the oscillator circuitry. It would be further beneficial for the oscillator circuitry to be able to leverage the improved noise performance of differential TIAs without sacrificing power consumption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.