Patent · US Active

Pyridinium compounds, a synthesis method therefor, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths

US10882842B2 · kind B2 · utility

0Cited by

5References

15Claims

0Family size

Assignee

Atotech Deutschland GmbH & Co. KG · DE

Inventors

Rangarajan Jagannathan · Hopewell Junction, US
James Adolf · Berlin, DE
Jun Wu · Houston, US
Lars Kohlmann · Berlin, DE
Heiko Brunner · Berlin, DE

Key dates

Filing date	Jan 26, 2018
Grant date	Jan 5, 2021
Priority date	—
Expiry date	Jan 26, 2038

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC25D7/123
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths.The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.