Method of producing a NTCR sensor
US10883179B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2018 |
| Grant date | Jan 5, 2021 |
| Priority date | — |
| Expiry date | May 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C7/043
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.