Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type
US10883892B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2016 |
| Grant date | Jan 5, 2021 |
| Priority date | — |
| Expiry date | May 24, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure measurement cell comprises: a ceramic counter body; a ceramic measuring diaphragm which is joined in a pressure-tight manner with the counter body, creating a measurement chamber between the counter body and the measuring diaphragm, by means of a circumferential joint. The measuring diaphragm can be deformed by a pressure to be measured; an electrical converter for converting a pressure-dependent deformation of the measuring diaphragm into an electrical signal; and a temperature transducer for providing at least one electrical signal dependent on a temperature or on a temperature gradient of the pressure measurement cell. The temperature transducer comprises at least one first thermocouple having a galvanic contact between a first conductor with an electrically conductive material and a second conductor with at least one second electrically conductive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.