Manufacturing method of wire grid polarizer
US10884170B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | May 17, 2017 |
| Grant date | Jan 5, 2021 |
| Priority date | — |
| Expiry date | Jul 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2207/101
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A manufacturing method of a wire grid polarizer is provided, including: setting pattern data, where the pattern data correspond to a wire grid structure of the wire grid polarizer; preparing a metal ion solution; immersing at least one surface of a carrier substrate in the metal ion solution; and emitting, by an emitter device, an electron beam to the carrier substrate, and controlling a movement of the electron beam according to the pattern data to deposit a metal on the carrier substrate at a position where the electron beam passes, to form the wire grid structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.