High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator
US10884313B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 14, 2019 |
| Grant date | Jan 5, 2021 |
| Priority date | — |
| Expiry date | May 14, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12159
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A nano-opto-electro-mechanical System (NOEMS) phase shifter is described. The NOEMS may include a multi-slot waveguide structure suspended in air. The multi-slot waveguide structure may include three or more waveguides separated from each other by slots. The width of the slots may be sufficiently small to support slot modes, where a substantial portion of the mode energy is within the slots. For example, the slots may have widths less than 200 nm or less than 100 nm. The multi-slot waveguide structure may be disposed in a trench formed though the upper cladding of a substrate. An undercut may be formed under the multi-slot waveguide structure to enable free motion of the structure. NOEMS phase modulators of the types described herein may be used in connection with photonic processing systems, telecom/datacom systems, analog systems, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.