Patent · US Active

Method of acquiring holograms by off-axis electron holography in precession mode

US10884379B2 · kind B2 · utility

1Cited by
6References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 20, 2018
Grant dateJan 5, 2021
Priority date
Expiry dateDec 12, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2614
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Method for acquisition of at least one hologram of a sample by off-axis holography using a transmission electron microscope, the microscope comprising an electron beam source, at least one objective lens, a sample holder, at electron biprism and means of displacing the electron beam in precession mode upstream from the sample holder and a compensator of the precession downstream from the sample holder, said method comprising the activation of means of displacing the electron beam in precession mode and the compensator and acquisition of a hologram of said sample in precession mode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.