Patent · US Active

Aromatic underlayer

US10886119B2 · kind B2 · utility

0Cited by
4References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 3, 2019
Grant dateJan 5, 2021
Priority date—
Expiry dateJul 3, 2039

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC08L2203/206
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Curable homopolymers formed from monomers having two 2-naphthol moieties are useful as underlayers in semiconductor manufacturing processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.