Patent · US Active

Optical inspection system

US10887500B2 · kind B2 · utility

2Cited by

6References

5Claims

0Family size

Assignee

Hong Kong Applied Science and Technology Research Institute Company Limited · CN

Inventors

Changli Wu · Linyi, CN
Ying Liu · Beijing, CN

Key dates

Filing date	Jan 24, 2017
Grant date	Jan 5, 2021
Priority date	—
Expiry date	Apr 10, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30108
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Optical inspection system detects defects of an object, such as an electronic device during manufacturing. The optical inspection system includes a first linear light source that irradiates a first light beam on a top surface of the object along a scan line across the width of the object. A second linear light source forms an angle with the first linear light source and irradiates a second light beam on a side surface of the object. A camera receives scattered light from the top surface and the side surface of the object and captures a subimage of the object along the scan line. An image processing system receives each subimage from the camera, stitches the subimages, and detects defects on the top surface and the side surface of the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.