Workpiece referencing system for and method of referencing workpieces supported by a workpiece carrier
US10889102B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2014 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Jun 22, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A workpiece referencing system and method, the system having a workpiece support assembly for supporting a plurality of workpieces, wherein the support assembly includes a support platform and a plurality of support members which are disposed to the support platform, each support member being configured to support an individual workpiece; and a workpiece referencing assembly for referencing the workpieces, as supported by the support assembly, to predetermined positions; wherein the support members each includes a body which includes a support surface which supports a workpiece and a resilient coupling which resiliently couples at least an upper part of the body relative to the support platform, such that the at least part of the body is displaceable relative to the support platform from a first, unbiased position to a second, biased reference position by operation of the referencing assembly, and, when released, the at least part of the body returns to the first, unbiased position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.