Patent · US Active

Method for producing a micromechanical element

US10889491B2 · kind B2 · utility

0Cited by

0References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Markus Kuhnke · Wannweil, DE
Heiko Stahl · Reutlingen, DE
Stefan Majoni · Holzgerlingen, DE

Key dates

Filing date	Sep 18, 2018
Grant date	Jan 12, 2021
Priority date	—
Expiry date	Sep 18, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for producing a micromechanical element includes producing a micromechanical structure, the micromechanical structure having: a functional layer for a micromechanical element, a sacrifical layer at least partly surrounding the functional layer, and a closure cap on the sacrifical layer. The method further includes applying a cover layer on the micromechanical structure. The method further includes producing a grid structure in the cover layer. The method further includes producing a cavity below the grid structure, as access to the sacrifical layer. The method further includes at least partly removing the sacrifical layer. The method further includes applying a closure layer at least on the grid structure of the cover layer for the purpose of closing the access to the cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.