Automatic calibration optical interferometer and automatic calibration method of optical interferometer
US10890429B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2019 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Apr 9, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/60
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.