Shape inspection apparatus and shape inspection method
US10890441B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2018 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Nov 27, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8924
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape inspection apparatus for inspecting a strip-shaped body includes: a line sensor camera; a first illumination light source and a second illumination light source; a measurement control unit; and a data processing unit. The measurement control unit controls the lighting timings and light emission time periods as well as the line image acquisition timing based on a line speed so that overlapping of photographing ranges does not occur between a first line image acquired within a light emission time period of the first illumination light source and a second line image acquired within a light emission time period of the second illumination light source. The data processing unit calculates an inclination of the surface of the strip-shaped body based on a differential line image obtained based on the first line image and the second line image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.