Force sensor
US10890496B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2019 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Jul 29, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a detection ring (600), the structure of which is shown in the perspective view of FIG. 13(a). The detection ring (600) is arranged so that the Z-axis is a central axis on the XY plane as shown in the side view (b), and a planar shape thereof is formed in a circular ring as shown in the bottom view (c). The detection ring (600) is structured so that four sets of detection portions (D1 to D4), each constituted with a blade spring which undergoes elastic deformation, are coupled with four sets of circular arc-shaped coupling portions (L1 to L4). A supporting substrate is arranged below the detection ring (600) and fixing points (P1, P2) arranged on the Y-axis are fixed to the supporting substrate. When force or moment to be detected is exerted on exertion points (Q1, Q2), the four sets of detection portions (D1 to D4) undergo elastic deformation. A displacement electrode is formed on a bottom of a displacement portion (63) at each of the detection portions (D1 to D4), and a fixed electrode is formed on a face facing the supporting substrate to form four sets of capacitive elements, thereby detecting force or moment exerted by operation on the basis of variation amou…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.