Patent · US Active

Semipolar or nonpolar group III-nitride substrates

US10892159B2 · kind B2 · utility

1Cited by
16References
20Claims
0Family size

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Key dates

Filing dateNov 20, 2017
Grant dateJan 12, 2021
Priority date
Expiry dateFeb 10, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/812
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Aspects of the disclosure provide for mechanisms for producing group III-nitride substrates. In accordance with some embodiments, a method for producing a group III-nitride substrate is provided. The method may include: forming, on a growth template, an epitaxial layer of a group III-nitride material comprising a surface with a first crystallographic orientation, wherein the first crystallographic orientation comprises a semipolar orientation or a nonpolar orientation; and separating the epitaxial layer of the group III-nitride material from the growth template to produce the group III-nitride substrate, wherein the growth template comprises a semiconductor layer of the group III-nitride material. The group III-nitride material may include gallium.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.