Bulk-acoustic wave resonator
US10892737B2 · kind B2 · utility
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8References
18Claims
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Assignee
Inventors
Key dates
| Filing date | Apr 19, 2019 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Apr 19, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/205
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk-acoustic wave resonator includes a substrate; a membrane layer forming a cavity with the substrate; a first electrode at least partially disposed on an upper portion of the cavity including an end portion that is thicker than other portions of the first electrode; an insertion layer including a first portion disposed adjacent to from the end portion of the first electrode and a second portion disposed on an upper portion of the first electrode; a piezoelectric layer disposed to cover the insertion layer; and a second electrode disposed on an upper portion of the piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.