Patent · US Active

Micromechanical z-inertial sensor

US10899603B2 · kind B2 · utility

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0References

10Claims

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Assignee

Robert Bosch GmbH · DE

Inventors

Ralf Boessendoerfer · Dinkelsbühl, DE
Jan Waldmann · Reutlingen, DE
Jochen Reinmuth · Reutlingen, DE

Key dates

Filing date	Nov 2, 2018
Grant date	Jan 26, 2021
Priority date	—
Expiry date	May 28, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0831
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.