Tungsten pentachloride conditioning and crystalline phase manipulation
US10899630B2 · kind B2 · utility
0Cited by
6References
14Claims
0Family size
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Key dates
| Filing date | Sep 27, 2018 |
| Grant date | Jan 26, 2021 |
| Priority date | — |
| Expiry date | Jan 2, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2002/72
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process of conditioning tungsten pentachloride to form specific crystalline phases are disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.