Radiation detector and method for manufacturing a radiation detector

US10900841B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Dirk Weiler · Germering, DE
• Kai-Marcel Muckensturm · Duisburg, DE
• Frank Hochschulz · Ahaus, DE

Key dates

• Filing date: Jan 5, 2017
• Grant date: Jan 26, 2021
• Expiry date: Jun 19, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/28
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.