Gross leak measurement in an incompressible test item in a film chamber

US10900862B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Silvio Decker · Cologne, DE
• Norbert Rolff · Horrem, DE

Key dates

• Filing date: Dec 20, 2016
• Grant date: Jan 26, 2021
• Expiry date: Oct 12, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/3236
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method for the gross leak measurement of an at least partially incompressible test object (18) in a film chamber (12) that comprises at least one flexible wall region and is connected, in a gas-conducting manner, to a pressure sensor (30), a vacuum pump (26) and, by way of a calibration valve (34), to a calibration chamber (36) enclosing a calibration volume (37), comprising the steps of evacuating the film chamber (12), measuring the pressure curve within the film chamber (12) after the evacuation is completed, connecting, in a gas-conducting manner, the calibration volume (37) to the inner volume of the film chamber (12) during the measurement of the pressure curve, the pressure being measured before the gas-conducting connection is established, and with the gas-conducting connection established, to the film chamber (12), and the pressure in the calibration chamber (36) prior to the connection to the film chamber (12) being higher or lower than the pressure in the film chamber (12), characterized in that the pressure difference Δpleer between the pressure before the gas-conducting connection is established and the pressure with a gas-conducting connecti…